X3511-64026
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Obsolete

Part Number:
X3511-64026

Obsolete. Replaced by X3511-64027

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Specifications
Base Pressure
  • <1 x 10-10 mbar
Compression Ratio Ar
  • >1 x 1011
Compression Ratio H2
  • >3 x 106
Compression Ratio He
  • 2 x 108
Compression Ratio N2
  • >1 x 1011
Cooling Method
  • Water cooling
Flange Type
  • CFF 10
Foreline Flange Size
  • KF 25 NW
Height
  • 235 mm
Length
  • 207 mm
Maximum Gas Throughput - Ar, Water Cooling
  • 3.3 mbar l/s; 195 sccm
Maximum Gas Throughput - He, Water Cooling
  • 10.4 mbar/Ls; 615 SCCM
Maximum Gas Throughput - N2, Water Cooling
  • 6.2 mbar l/s; 367 sccm
Noise Level
  • 43 dB(A)
Pumping Speed - Ar
  • 690 L/s
Pumping Speed - H2
  • 485 L/s
Pumping Speed - He
  • 660 L/s
Pumping Speed - N2
  • 720 L/s
Weight
  • 22.1 kg
Width
  • 207 mm