X3513-64019
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TwisTorr 305-IC Turbo Pump with Integrated Controller

Part Number:
X3513-64019

TwisTorr 305-IC turbo pump, DN 160 CF-F (8 in CFF), air cooling, RS485P

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Specifications
Ambient Operating Temperature
  • +5 to +35 °C
Ambient Storage Temperature
  • -40 to +70 °C
Base Pressure
  • <1 x 10-10 mbar
Compression Ratio Ar
  • >1 x 1011
Compression Ratio H2
  • 1.5 x 106
Compression Ratio He
  • >1 x 108
Compression Ratio N2
  • >1 x 1011
Cooling Method
  • Air cooling
Flange Type
  • CFF 8
Foreline Flange Size
  • KF 16 NW
Height
  • 189.84 mm
Length
  • 174.8 mm
Maximum Gas Throughput - N2, Water Cooling
  • 250 sccm
Noise Level
  • 41 dB(A)
Pumping Speed - Ar
  • 250 L/s
Pumping Speed - H2
  • 220 L/s
Pumping Speed - He
  • 255 L/s
Pumping Speed - N2
  • 250 L/s
Standards and Certifications
  • EN 61010-1
    EN 61326-1
    EN 1012-2
    EN 12100
    EN 50581
    Machinery Directive 2006/42/EC
    Electromagnetic Compatibility Directive 2014/30/
    EU Directive 2011/65/EU
Weight
  • 10.33 kg
Width
  • 144 mm