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Semiconductor device fabrication requires strict control of sources of contamination, as even trace-level contaminants can lead to yield loss or product failures. Monitoring and controlling trace metals and particle contamination in wafer, CMP slurries, metal interconnects, REE materials, photoresist, process chemicals and electronic gases or in display materials and precursors is critical. Agilent has been a partner to the semiconductor and electronics industry for more than 40 years, and we are continuously innovating to meet the needs of this fast-moving industry. Our high-performance analytical instrumentation, applications and workflows, technical support and services help you meet your semiconductor impurities testing requirements for yield enhancement.
If you have questions about inorganic impurities analysis in semiconductors or would like to be contacted by an Agilent representative, let us know below.
Monitoring and controlling trace-level contamination in wafer, CMP slurries, interconnects, REE materials, and photoresist chemicals is critical.
Trace-level contaminants have detrimental effects on manufacturing. Learn more about testing for analysis of impurities in semiconductor process chemicals.
Novel, efficient, and elegant approaches for direct analysis of impurities testing in electronic gases.
Solutions for monitoring metallic nanoparticles (NPs) and dissolved metals in bulk chemicals and in wafer processing and cleaning baths.
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