Skip to main content

Varian Reports: Diffusion Pump Operation

Agilent, formerly Varian, published technical documentation for years under the name “Varian Reports”. These technical guides appeared in publications such as American Vacuum Society (AVS) or Society of Vacuum Coaters (SVC). Many of the same concepts remain relevant today when operating a diffusion pump. Below are three papers detailing technical operation of diffusion pumps and diffusion-pumped systems.

 Still have diffusion pump questions? Contact one of our experts.

Contact Us
×

Contact Us


VR-187: Diffusion Pump System and Its Operation

For proper selection of pump size, it is necessary to consider different system requirements: the evacuation time to a given pressure, maintaining a certain pressure during a process, process cycle time, and maximum potential gas flow rate. This paper covers the considerations you need to make for your diffusion pump system to avoid overloading your pump.


VR-175: Overload Conditions in High-Vacuum Pumps

Diffusion pumps have a limiting inlet pressure above which they cannot function. Recognizing and dealing with the approaching overload conditions is an important aspect of vacuum system operation. This white paper outlines the basic considerations for selecting the pressure at which the high-vacuum pumps are started, emphasizing the importance of mass flow (throughput) limits rather than the pressure as such.


VR-96: Troubleshooting a Vacuum System

This paper is intended to assist operating personnel in making routine analysis of vacuum problems. The key points of this paper concern the orderly recording of normal operation for purposes of comparison to existing conditions, and, secondly, the isolation of various sections of the pumping system to narrow down the probable causes of performance deterioration.





DE15589446

×

Contact Us